Ion beam-induced anisotropic plastic deformation of silicon microstructures

2004

Appl. Phys. Lett. , Volume 84 p. 3591- 3593

Additional Metadata
Persistent URL	doi.org/10.1063/1.1737480
Journal	Appl. Phys. Lett.
Organisation	Photonic Materials
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	van Dillen, T., de Dood, M., Penninkhof, J. J., Polman, A., Roorda, S., & Vredenberg, A. J. (2004). Ion beam-induced anisotropic plastic deformation of silicon microstructures. Appl. Phys. Lett., 84, 3591–3593. doi:10.1063/1.1737480

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