Damage annealing and epitaxial realignment of ion-implanted Si

Additional Metadata
Degree Grantor	Utrecht University
Promotor	F.W. Saris , E. Rimini
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Cacciato, A. (1994, December 12). Damage annealing and epitaxial realignment of ion-implanted Si.

Publication