1993
Interface structure during ion-beam-induced epitaxial crystallization of silicon
Publication
Publication
Nucl. Instrum. Methods Phys. Res. B , Volume 80/81 p. 881- 885
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Nucl. Instrum. Methods Phys. Res. B | |
Custer, J. S., Battaglia, A., Saggio, M., & Priolo, F. (1993). Interface structure during ion-beam-induced epitaxial crystallization of silicon. Nucl. Instrum. Methods Phys. Res., Sect B, 80/81, 881–885. |