Tungsten deposition on GaAs using WF6 and atomic hydrogen

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Journal	J. Appl. Phys.
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	van Maaren, A. J. P., & Sinke, W. (1993). Tungsten deposition on GaAs using WF6 and atomic hydrogen. J. Appl. Phys., 73, 1989–1992.

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