1992
The energy dependence of ion damage in AlxGa1-xAs/GaAs heterostructures and the effects of implanted impurity
Publication
Publication
Additional Metadata | |
---|---|
Materials Research Society | |
G.S. Was , L.E. Rehn , D.M. Follstaedt | |
Organisation | Photonic Materials |
Cullis, A. G., Jacobson, D. C., Polman, A., Smith, P. W., Poate, J. M., & Whitehouse, C. R. (1992). The energy dependence of ion damage in AlxGa1-xAs/GaAs heterostructures and the effects of implanted impurity. In G. S. Was, L. E. Rehn, & D. M. Follstaedt (Eds.), Phase Formation and Modification by Beam-Solid Interactions : Symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A. (pp. 229–234). |