Dislocation formation in silicon implanted at different temperatures

1992

Mater. Sci. Eng. B , Volume 15 p. 173- 186

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Journal	Mater. Sci. Eng. B
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Liefting, J. R., Custer, J. S., Schreutelkamp, R., & Saris, F. W. (1992). Dislocation formation in silicon implanted at different temperatures. Mater. Sci. Eng. B, 15, 173–186.

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