Avoiding dislocation formation for B, P. and As implants in silicon

1992

Additional Metadata
Publisher	Materials Research Society
Editor	G.S. Was , L.E. Rehn , D.M. Follstaedt
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Liefting, J. R., Raineri, V., Schreutelkamp, R., Custer, J. S., & Saris, F. W. (1992). Avoiding dislocation formation for B, P. and As implants in silicon. In G. S. Was, L. E. Rehn, & D. M. Follstaedt (Eds.), Phase Formation and Modification by Beam-Solid Interactions : Symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A. (pp. 173–178).

Publication