1992
Ion beam modification of Mo-Si multilayer systems for X-ray reflection
Publication
Publication
Appl. Surf. Sci. , Volume 55 p. 97- 103
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Appl. Surf. Sci. | |
Verhoeven, J., Chunguang, L., Puik, E. J., van der Wiel, M. J., & Huijgen, T. P. (1992). Ion beam modification of Mo-Si multilayer systems for X-ray reflection. Appl. Surf. Sci., 55, 97–103. |