Pre-amorphization damage in ion-implanted silicon

1991

Mater. Sci. Rep. , Volume 6 p. 275- 366

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Journal	Mater. Sci. Rep.
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Schreutelkamp, R., Custer, J. S., Liefting, J. R., Lu, W. X., & Saris, F. W. (1991). Pre-amorphization damage in ion-implanted silicon. Mater. Sci. Rep., 6, 275–366.

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