1991
Amorphous Si - the role of MeV implantation in elucidating defect and thermodynamic properties
Publication
Publication
Nucl. Instrum. Methods Phys. Res. B , Volume 55 p. 533- 543
Additional Metadata | |
---|---|
Nucl. Instrum. Methods Phys. Res. B | |
Organisation | Photonic Materials |
Poate, J. M., Coffa, S., Jacobson, D. C., Polman, A., Roth, J. A., Olson, G. L., … Donovan, E. (1991). Amorphous Si - the role of MeV implantation in elucidating defect and thermodynamic properties. Nucl. Instrum. Methods Phys. Res., Sect B, 55, 533–543. |