1991
Reduction of boron diffusion in silicon by 1 MeV 29Si+ irradiation
Publication
Publication
Appl. Phys. Lett. , Volume 58 p. 922- 924
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Appl. Phys. Lett. | |
Raineri, V., Schreutelkamp, R., Saris, F. W., Janssen, K. T. F., & Kaim, R. E. (1991). Reduction of boron diffusion in silicon by 1 MeV 29Si+ irradiation. Appl. Phys. Lett., 58, 922–924. |