1991
Ion bombardment of X-ray multilayer coatings: comparison of ion etching and ion assisted deposition
Publication
Publication
Appl. Surf. Sci. , Volume 47 p. 251- 260
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Appl. Surf. Sci. | |
Puik, E. J., van der Wiel, M. J., Zeijlemaker, H., & Verhoeven, J. (1991). Ion bombardment of X-ray multilayer coatings: comparison of ion etching and ion assisted deposition. Appl. Surf. Sci., 47, 251–260. |