1990
X-ray reflectivity of an Sb delta-doping layer in silicon
Publication
Publication
J. Appl. Phys. , Volume 68 p. 5105- 5108
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J. Appl. Phys. | |
Slijkerman, W. F. J., Gay, J. M., Zagwijn, P. M., van der Veen, J. F., MacDonald, J. E., Williams, A. A., … van de Walle, G. F. A. (1990). X-ray reflectivity of an Sb delta-doping layer in silicon. J. Appl. Phys., 68, 5105–5108. |