Emission spectroscopy and actinometry in a magnetized low pressure radio frequency discharge

1990

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Journal	J. Vac. Sci. Technol. A
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Kuypers, A. D., Koch, A., & Hopman, H. J. (1990). Emission spectroscopy and actinometry in a magnetized low pressure radio frequency discharge. J. Vac. Sci. Technol. A, 3736–3745.

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