On the use of H+ and Ar+ ions for high spatial resolution depth profiling

1990

Vacuum , Volume 41 p. 1327- 1329

Additional Metadata
Journal	Vacuum
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Verhoeven, J., Zeijlemaker, H., Puik, E. J., & van der Wiel, M. J. (1990). On the use of H+ and Ar+ ions for high spatial resolution depth profiling. Vacuum, 41, 1327–1329.

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