1990
Stability of amorphous Ir-Ta diffusion barriers between Cu and Si
Publication
Publication
Mater. Lett. , Volume 9 p. 500- 503
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Mater. Lett. | |
de Reus, R., Koper, R. J. I. M., Zeijlemaker, H., & Saris, F. W. (1990). Stability of amorphous Ir-Ta diffusion barriers between Cu and Si. Mater. Lett., 9, 500–503. |