1990
Stability of amorphous Ir-Ta diffusion barriers between Cu and Si
Publication
Publication
Mater. Lett. , Volume 9 p. 500- 503
| Additional Metadata | |
|---|---|
| Mater. Lett. | |
|
de Reus, R., Koper, R. J. I. M., Zeijlemaker, H., & Saris, F. W. (1990). Stability of amorphous Ir-Ta diffusion barriers between Cu and Si. Mater. Lett., 9, 500–503. |
|