1990
Avoiding transient diffusion of boron in Si(100)
Publication
Publication
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Materials Research Society | |
J.A. Knapp , P. Borgesen , R.A. Zuhr | |
Schreutelkamp, R., Lu, W. X., Saris, F. W., Janssen, K. T. F., Ottenheim, J. J. M., Kaim, R. E., & Westendorp, J. F. M. (1990). Avoiding transient diffusion of boron in Si(100). In J. A. Knapp, P. Borgesen, & R. A. Zuhr (Eds.), Beam-Solid Interactions : Physical Phenomena : Symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A. (pp. 691–696). |