1990
Density measurements of ion implanted amorphous silicon
Publication
Publication
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Materials Research Society | |
J.A. Knapp , P. Borgesen , R.A. Zuhr | |
Custer, J. S., Thompson, M. O., Jacobson, D. C., Poate, J. M., Roorda, S., Sinke, W., & Spaepen, F. (1990). Density measurements of ion implanted amorphous silicon. In J. A. Knapp, P. Borgesen, & R. A. Zuhr (Eds.), Beam-Solid Interactions : Physical Phenomena : Symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A. (pp. 689–690). |