Gettering of Cu at buried damage layers made by Si self implantation

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Publisher	Materials Research Society
Editor	J.A. Knapp , P. Borgesen , R.A. Zuhr
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Liefting, J. R., Schreutelkamp, R., Lu, W. X., & Saris, F. W. (1990). Gettering of Cu at buried damage layers made by Si self implantation. In J. A. Knapp, P. Borgesen, & R. A. Zuhr (Eds.), Beam-Solid Interactions : Physical Phenomena : Symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A. (pp. 641–644).

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