Thermal stability of supersaturated oxygen-doped silicon epitaxial films

1990

Appl. Surf. Sci. , Volume 44 p. 115- 119

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Journal	Appl. Surf. Sci.
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Fischer, A. E. M. J., Slijkerman, W. F. J., van der Veen, J. F., & Ohdomari, I. (1990). Thermal stability of supersaturated oxygen-doped silicon epitaxial films. Appl. Surf. Sci., 44, 115–119.

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