Measurement of ion energy distributions at the powered rf electrode in a variable magnetic field

1990

J. Appl. Phys. , Volume 67 p. 1229- 1240

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Journal	J. Appl. Phys.
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Kuypers, A. D., & Hopman, H. J. (1990). Measurement of ion energy distributions at the powered rf electrode in a variable magnetic field. J. Appl. Phys., 67, 1229–1240.

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