Structural characterization of an Sb delta-doping layer in silicon

1989

Appl. Phys. Lett. , Volume 55 p. 963- 965

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Journal	Appl. Phys. Lett.
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Slijkerman, W. F. J., Zagwijn, P. M., van der Veen, J. F., van Gorkum, A. A., & van de Walle, G. F. A. (1989). Structural characterization of an Sb delta-doping layer in silicon. Appl. Phys. Lett., 55, 963–965.

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