High energy implantation: present and future facilities

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Journal	Nucl. Instrum. Methods Phys. Res. B
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Bannenberg, J. G., & Saris, F. W. (1989). High energy implantation: present and future facilities. Nucl. Instrum. Methods Phys. Res., Sect B, 37/38, 398–402.

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