1989
Channeled implantation with a parallel scanned ion beam
Publication
Publication
Nucl. Instrum. Methods Phys. Res. B , Volume 37/38 p. 357- 360
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Nucl. Instrum. Methods Phys. Res. B | |
Westendorp, J. F. M., Kaim, R. E., Odlum, G. B., Schreutelkamp, R., Saris, F. W., & Janssen, K. T. F. (1989). Channeled implantation with a parallel scanned ion beam. Nucl. Instrum. Methods Phys. Res., Sect B, 37/38, 357–360. |