1988
Solid phase epitaxial regrowth of microcrystalline Si films on a (100) Si substrate
Publication
Publication
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Materials Research Society | |
M.J. Aziz , L.E. Rehn , B. Stritzker | |
Roorda, S., Saito, S., & Sinke, W. (1988). Solid phase epitaxial regrowth of microcrystalline Si films on a (100) Si substrate. In M. J. Aziz, L. E. Rehn, & B. Stritzker (Eds.), Fundamentals of Beam-Solid Interactions and Transient Thermal Processing : Symposium held November 30-December 3, 1987, Boston, Massachusetts, USA (pp. 417–422). |