Near threshold sputtering of Si and Si02 in a CI2 environment

1987

Appl. Phys. Lett. , Volume 50 p. 1506- 1508

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Journal	Appl. Phys. Lett.
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Oostra, D. J., van Ingen, R. P., Haring, R. A., de Vries, A. E., & van Veen, G. N. A. (1987). Near threshold sputtering of Si and Si02 in a CI2 environment. Appl. Phys. Lett., 50, 1506–1508.

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