A high current multichannel (MEQALAC) system for ion implantation

1987

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Journal	Nucl. Instrum. Methods Phys. Res. B
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Weis, T., Klein, H., Schempp, A., van Amersfoort, P. W., Siebenlist, F., & Thomae, R. W. (1987). A high current multichannel (MEQALAC) system for ion implantation. Nucl. Instrum. Methods Phys. Res., Sect B, 24, 787–790.

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