1987
Chemical sputtering by ions, electrons and photons
Publication
Publication
Nucl. Instrum. Methods Phys. Res. B , Volume 18 p. 618- 624
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Nucl. Instrum. Methods Phys. Res. B | |
Oostra, D. J., & de Vries, A. E. (1987). Chemical sputtering by ions, electrons and photons. Nucl. Instrum. Methods Phys. Res., Sect B, 18, 618–624. |