1986
Anomalous time-of-flight distributions observed for argon implanted in silicon and resputtered by Ar+-ion bombardment
Publication
Publication
Phys. Rev. Lett. , Volume 57 p. 739- 741
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Phys. Rev. Lett. | |
van Veen, G. N. A., Sanders, F. H. M., Dieleman, J., van Veen, A., Oostra, D. J., & de Vries, A. E. (1986). Anomalous time-of-flight distributions observed for argon implanted in silicon and resputtered by Ar+-ion bombardment. Phys.Rev.Lett., 57, 739–741. |