1986
Automatic electron-beam deposition of multilayer soft x-ray coatings with laterally graded d-spacing
Publication
Publication
Opt. Eng. , Volume 25 p. 916- 921
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Opt. Eng. | |
Bruijn, M. P., Chakraborty, S., van Essen, H. W., Verhoeven, J., & van der Wiel, M. J. (1986). Automatic electron-beam deposition of multilayer soft x-ray coatings with laterally graded d-spacing. Opt. Eng., 25, 916–921. |