1986
Solid-phase epitaxial regrowth of fine-grain polycrystalline silicon
Publication
Publication
J. Mater. Res. , Volume 1 p. 155- 161
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J. Mater. Res. | |
Sinke, W., Saris, F. W., Barbour, J. C., & Mayer, J. W. (1986). Solid-phase epitaxial regrowth of fine-grain polycrystalline silicon. J. Mater. Res., 1, 155–161. |