1985
Solid-phase epitaxial regrowth of fine-grain polycrystalline silicon
Publication
Publication
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Editions de Physique | |
V.T. Nguyen , A.G. Cullis | |
Sinke, W., Saris, F. W., Ullrich, B. M., Barbour, J. C., & Mayer, J. W. (1985). Solid-phase epitaxial regrowth of fine-grain polycrystalline silicon. In V. T. Nguyen & A. G. Cullis (Eds.), Energy Beam-Solid Interactions and Transient Thermal Processing, 1985, IV : May 13th - 15th 1985, Strasbourg (France) (pp. 217–221). |