1985
High-temperature SiO2 decomposition at the SiO2/Si interface
Publication
Publication
Phys. Rev. Lett. , Volume 55 p. 2332- 2335
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Phys. Rev. Lett. | |
Tromp, R. M., Rubloff, G. W., Balk, P., LeGoues, F. K., & van Loenen, E. J. (1985). High-temperature SiO2 decomposition at the SiO2/Si interface. Phys.Rev.Lett., 55, 2332–2335. |