Oxygen in titanium nitride diffusion barriers

1985

Appl. Phys. Lett. , Volume 47 p. 471- 473

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Journal	Appl. Phys. Lett.
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Sinke, W., Frijlink, G. P. A., & Saris, F. W. (1985). Oxygen in titanium nitride diffusion barriers. Appl. Phys. Lett., 47, 471–473.

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