Pre-annealing of TiN barriers in A1 metallization of silicon

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Publisher	Materials Research Society
Editor	J.M. Gibson , L.R. Dawson
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Sinke, W., Stout, P. K., & Saris, F. W. (1985). Pre-annealing of TiN barriers in A1 metallization of silicon. In J. M. Gibson & L. R. Dawson (Eds.), Layered Structures, Epitaxy, and Interfaces : Symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A. (pp. 623–628).

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