Surface characterization of arsenic implanted silicon (100): a new insight into the inhibition of aluminium/silicon interdiffusion

1985

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Publisher	Materials Research Society
Editor	J.M. Gibon , L.R. Dawson
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Herbots, N., Gloesener, D., van Loenen, E. J., & Fischer, A. E. M. J. (1985). Surface characterization of arsenic implanted silicon (100): a new insight into the inhibition of aluminium/silicon interdiffusion. In J. M. Gibon & L. R. Dawson (Eds.), Layered Structures, Epitaxy, and Interfaces : Symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A. (pp. 613–617).

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