1984
Reactive sputtering of simple condensed gases by keV ions II: mass spectra
Publication
Publication
Nucl. Instrum. Methods Phys. Res. B , Volume 5 p. 476- 482
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Nucl. Instrum. Methods Phys. Res. B | |
Haring, R. A., Pedrys, R., Oostra, D. J., Haring, R. A., & de Vries, A. E. (1984). Reactive sputtering of simple condensed gases by keV ions II: mass spectra. Nucl. Instrum. Methods Phys. Res., Sect B, 5, 476–482. |