Chemical sputtering

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Publisher	Institute of Physics of the University
Editor	G. Pichler
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	de Vries, A. E. (1982). Chemical sputtering. In G. Pichler (Ed.), The Physics of Iionized Gases : Invited Lectures, Review Reports and Progress Reports of SPIG-82 (pp. 189–202).

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