1983
Modulation doping structures in silicon by molecular beam epitaxy and off-line ion implantation
Publication
Publication
Mater. Lett. , Volume 1 p. 157- 162
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Mater. Lett. | |
de Jong, T., Douma, W. A. S., Doorn, S., & Saris, F. W. (1983). Modulation doping structures in silicon by molecular beam epitaxy and off-line ion implantation. Mater. Lett., 1, 157–162. |