1982
Laser processing in silicon molecular beam epitaxy
Publication
Publication
Additional Metadata | |
---|---|
North-Holland | |
B.R. Appleton , G.K. Celler | |
de Jong, T., Smit, L., & Saris, F. W. (1982). Laser processing in silicon molecular beam epitaxy. In B. R. Appleton & G. K. Celler (Eds.), Laser and Electron-Beam Interactions with Solids : Proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A. (pp. 215–220). |