1981
Threshold energy density for pulsed laser annealing of silicon
Publication
Publication
Additional Metadata | |
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North Holland | |
J.F. Gibbons , L.D. Hess , T.W. Sigmon | |
Hoonhout, D., & Saris, F. W. (1981). Threshold energy density for pulsed laser annealing of silicon. In J. F. Gibbons, L. D. Hess, & T. W. Sigmon (Eds.), Laser and Electron-Beam Solid Interactions and Materials Processing : Proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A. (pp. 31–37). |