1980
Residual damage to an atomically cleaned low-temperature-annealed Si (100) surface
Publication
Publication
Appl. Phys. Lett. , Volume 37 p. 563- 565
Additional Metadata | |
---|---|
Appl. Phys. Lett. | |
Yamada, I., Marton, D., & Saris, F. W. (1980). Residual damage to an atomically cleaned low-temperature-annealed Si (100) surface. Appl. Phys. Lett., 37, 563–565. |