1980
Residual damage to an atomically cleaned low-temperature-annealed Si (100) surface
Publication
Publication
Appl. Phys. Lett. , Volume 37 p. 563- 565
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| Appl. Phys. Lett. | |
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Yamada, I., Marton, D., & Saris, F. W. (1980). Residual damage to an atomically cleaned low-temperature-annealed Si (100) surface. Appl. Phys. Lett., 37, 563–565. |
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