1980
The energy distribution of molecules sputtered from frozen SF6
Publication
Publication
Additional Metadata | |
---|---|
Institut für Allgemeine Physik | |
P. Varga , G. Betz , F.P. Viehb | |
Szymonski, M., Paschke, U., Pedrys, R., Haring, R. A., Haring, R. A., Roosendaal, H. E., … de Vries, A. E. (1980). The energy distribution of molecules sputtered from frozen SF6. In P. Varga, G. Betz, & F. P. Viehb (Eds.), Molecular ScatteringSymposium on Sputtering : Proceedings of the Symposium on Sputtering Perchtoldsdorf/Wien, Austria 1980 April 28-30 (pp. 312–319). |