Energy distributions of sputtered neutral particles by ion bombardment

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Publisher	Institut fÃ¼r Allgemeine Physik
Editor	P. Varga , G. Betz , F.P. Viehb
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	de Vries, A. E. (1980). Energy distributions of sputtered neutral particles by ion bombardment. In P. Varga, G. Betz, & F. P. Viehb (Eds.), Symposium on Sputtering : Proceedings of the Symposium on Sputtering Perchtoldsdorf/Wien, Austria 1980 April 28-30 (pp. 256–279).

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