1979
Nonthermal pulsed laser annealing of Si; plasma annealing
Publication
Publication
Phys. Lett. A , Volume 74 p. 422- 426
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Phys. Lett. A | |
van Vechten, J. A., Tsu, R., & Saris, F. W. (1979). Nonthermal pulsed laser annealing of Si; plasma annealing. Phys. Lett. A, 74, 422–426. |