1979
Differences between ruby and Nd: YAG laser annealing of ion implanted silicon
Publication
Publication
Phys. Lett. A , Volume 69 p. 436- 438
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Phys. Lett. A | |
Tamminga, Y., Eggermont, G. E. J., Hofker, W. K., Hoonhout, D., Garrett, R., & Saris, F. W. (1979). Differences between ruby and Nd: YAG laser annealing of ion implanted silicon. Phys. Lett. A, 69, 436–438. |