1978
Production and beam annealing of damage in carbon implanted Si. I
Publication
Publication
Radiat. Eff. , Volume 36 p. 35- 40
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Radiat. Eff. | |
Roosendaal, H. E., Kool, W. H., & Saris, F. W. (1978). Production and beam annealing of damage in carbon implanted Si. I. Radiat. Eff., 36, 35–40. |