High flux reactive ion etching in a magnetic multipole reactor

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Degree Grantor	Utrecht University
Promotor	F.W. Saris , E.H.A. Granneman
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Kuypers, A. D. (1989, June 7). High flux reactive ion etching in a magnetic multipole reactor.

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