Engineering of damage in ion implanted silicon

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Degree Grantor	University of Twente
Promotor	H. Wallinga , F.W. Saris
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Liefting, J. R. (1992, June 18). Engineering of damage in ion implanted silicon.

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